Inventor
KOPPEL LOUIS N
US8 patents
⚠️ This page may combine multiple inventors who share the name “KOPPEL LOUIS N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
6 patentsUS6453006B1Sep 17, 2002
Calibration and alignment of X-ray reflectometric systems
THERMA WAVE INC93 citations98
US6643354B2Nov 4, 2003
Calibration and alignment of X-ray reflectometric systems
THERMA WAVE INC78 citations97
US6507634B1Jan 14, 2003
System and method for X-ray reflectometry measurement of low density films
THERMA WAVE INC61 citations95
US6768785B2Jul 27, 2004
Calibration and alignment of X-ray reflectometric systems
THERMA WAVE INC32 citations92
US6744850B2Jun 1, 2004
X-ray reflectance measurement system with adjustable resolution
THERMA WAVE INC35 citations92
US6770886B1Aug 3, 2004
Detector-shield assembly for X-ray reflectometric system
THERMA WAVE INC1 citations42