Inventor

OPSAL JON

US127 patents

⚠️ This page may combine multiple inventors who share the name “OPSAL JON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OPSAL JON

THERMA WAVE INC

Optical scatterometry of asymmetric lines and structures

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements

Real time analysis of periodic structures on semiconductors

Detector configurations for optical metrology

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Apparatus for evaluating metalized layers on semiconductors

Broadband spectroscopic rotating compensator ellipsometer

Thin film optical measurement system and method with calibrating ellipsometer

Broadband spectroscopic rotating compensator ellipsometer

Thin film optical measurement system and method with calibrating ellipsometer

Integrated spectroscopic ellipsometer

Method and apparatus for evaluating the thickness of thin films

Optical measurement device with enhanced sensitivity

Method and apparatus for evaluating ion implant dosage levels in semiconductors

Method and apparatus for evaluating surface and subsurface features in a semiconductor

Method and apparatus for optically detecting surface states in materials

Thin film thickness measurement with thermal waves

Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements

Real time analysis of periodic structures on semiconductors

Calibration and alignment of X-ray reflectometric systems

High resolution ellipsometric apparatus

Method and apparatus for measuring thickness of thin films

CD metrology analysis using green&#39;s function

Calibration and alignment of X-ray reflectometric systems

Systems and methods for immersion metrology

Detector configurations for optical metrology

Thin film optical measurement system and method with calibrating ellipsometer

Detector configurations for optical metrology

Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry

Critical dimension analysis with simultaneous multiple angle of incidence measurements

Thin film optical measurement system and method with calibrating ellipsometer

Apparatus for evaluating metalized layers on semiconductors

Apparatus for analyzing multi-layer thin film stacks on semiconductors

Thin film optical measurement system and method with calibrating ellipsometer

Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements

Apparatus for evaluating metalized layers on semiconductors

Broadband spectroscopic rotating compensator ellipsometer

Thin film optical measurement system and method with calibrating ellipsometer

Apparatus for evaluating metalized layers on semiconductors

Broadband spectroscopic rotating compensator ellipsometer

Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor

Method and apparatus for evaluating surface and subsurface features in a semiconductor

Evaluating both thickness and compositional variables in a thin film sample

Method and apparatus for detecting thermal waves

KLA TENCOR CORP

High resolution monitoring of CD variations

Multiple tool and structure analysis

THERMA-WAVE INC

Spatial averaging technique for ellipsometry and reflectometry

CD metrology analysis using green's function