Inventor
CHU YUN-WEN
TW4 patents
Patents
4 patentsUS11049945B2Jun 29, 2021
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10276677B2Apr 30, 2019
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US9496157B2Nov 15, 2016
Ultraviolet curing apparatus having top liner and bottom liner made of low-coefficient of thermal expansion material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations37
US9991154B2Jun 5, 2018
Method for fabricating a fin field effect transistor and a shallow trench isolation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations30