Inventor
KUMMEL ANDREW
US14 patents
⚠️ This page may combine multiple inventors who share the name “KUMMEL ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
10 patentsUS10134585B2Nov 20, 2018
Low temperature atomic layer deposition of oxides on compound semiconductors
UNIV CALIFORNIA5 citations70
US12497694B2Dec 16, 2025
Method of forming low-resistivity Ru ALD through a bi-layer process and related structures
UNIV CALIFORNIA0 citations58
US12154787B2Nov 26, 2024
Methods of performing selective low resistivity Ru atomic layer deposition and interconnect formed using the same
UNIV CALIFORNIA0 citations57
US12080549B2Sep 3, 2024
Semiconductor structure with nanofog oxide adhered to inert or weakly reactive surfaces
UNIV CALIFORNIA0 citations57
US11127590B2Sep 21, 2021
Method for ALD deposition on inert surfaces via Al2O3 nanoparticles
UNIV CALIFORNIA0 citations57
US12027488B2Jul 2, 2024
Methods of forming stacked integrated circuits using selective thermal atomic layer deposition on conductive contacts and structures formed using the same
UNIV CALIFORNIA0 citations54
US11532355B2Dec 20, 2022
Non-volatile multi-level cell memory using a ferroelectric superlattice and related systems
UNIV CALIFORNIA0 citations50
US12557651B2Feb 17, 2026
Low-temperature deposition of high-quality aluminum nitride films for heat spreading applications
UNIV CALIFORNIA0 citations44
US12180583B2Dec 31, 2024
Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices
UNIV CALIFORNIA0 citations43
US11993844B2May 28, 2024
Passivation of silicon dioxide defects for atomic layer deposition
UNIV CALIFORNIA0 citations42
APPLIED MATERIALS INC
3 patentsUS10475655B2Nov 12, 2019
Selective deposition of metal silicides
APPLIED MATERIALS INC2 citations70
US10586707B2Mar 10, 2020
Selective deposition of metal silicides
APPLIED MATERIALS INC0 citations49
US10262858B2Apr 16, 2019
Surface functionalization and passivation with a control layer
APPLIED MATERIALS INC0 citations48