Inventor

BABBS DANIEL

US27 patents

⚠️ This page may combine multiple inventors who share the name “BABBS DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BABBS DANIEL

BROOKS AUTOMATION INC

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

Substrate transport

Reduced capacity carrier, transport, load port, buffer system

Side opening unified pod

Substrate transport apparatus

Substrate transport

Transport apparatus with linear bearing

Substrate processing apparatus

Side opening unified pod

BROOKS AUTOMATION US LLC

Substrate transport

Substrate transport apparatus

Transport apparatus with linear bearing

Substrate processing apparatus

MOLECULAR IMPRINTS INC

Chucking system for modulating shapes of substrates

Method, system and holder for transferring templates during imprint lithography processes

Chucking system for modulating shapes of substrates

BABBS DANIEL

Side opening unified pod

Carrier gas system and coupling substrate carrier to a loadport

Transport system

BUFANO MICHAEL L

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

Reduced capacity carrier, transport, load port, buffer system

ASYST TECHNOLOGIES

System for parallel processing of workpieces

System for safeguarding integrated intrabay pod delivery and storage system

ASYT TECHNOLOGIES INC

Modular sorter

BOOKS AUTOMATION US LLC

Substrate transport