Inventor

CHUANG KAI-LIN

TW18 patents

⚠️ This page may combine multiple inventors who share the name “CHUANG KAI-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHUANG KAI-LIN

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor processing tool and methods of operation

Nozzle having real time inspection functions

Semiconductor device structure including stacked nanostructures

Semiconductor processing tool and methods of operation

Nozzle having real time inspection functions

Nozzle having real time inspection functions

Method of processing semiconductor substrate

Semiconductor device structure and method for forming the same

Method of manufacturing a semiconductor device including forming a sidewall spacer on a sidewall of a channel structure

In-situ apparatus for detecting abnormality in process tube

Apparatus and methods for determining fluid dynamics of liquid film on wafer surface

Apparatus of processing semiconductor substrate

UNITED MICROELECTRONICS CORP

Method for forming photomasks

Calculation method for generating layout pattern in photomask

Method for forming patterns

Photomask and fabrication method thereof

Method for forming photo-mask and OPC method

CHUANG KAI-LIN

Alignment accuracy mark