Inventor
TANAKA TADAMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA TADAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO MITSUBISHI SILICON
5 patentsUS6569237B2May 27, 2003
Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer
SUMITOMO MITSUBISHI SILICON22 citations91
US6905771B2Jun 14, 2005
Silicon wafer
SUMITOMO MITSUBISHI SILICON12 citations83
US6835245B2Dec 28, 2004
Method of manufacturing epitaxial wafer and method of producing single crystal as material therefor
SUMITOMO MITSUBISHI SILICON8 citations72
US6709957B2Mar 23, 2004
Method of producing epitaxial wafers
SUMITOMO MITSUBISHI SILICON9 citations72
US7014704B2Mar 21, 2006
Method for growing silicon single crystal
SUMITOMO MITSUBISHI SILICON5 citations61