Inventor
TOMITA KAZUYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
3 patentsUS5443689AAug 22, 1995
Dry etching process utilizing a recessed electrode
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD37 citations92
US4906347AMar 6, 1990
Dry-etching apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73
US4678539AJul 7, 1987
Dry-etching method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD18 citations72