Inventor

NOGAMI CHITOSHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “NOGAMI CHITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US5254176AOct 19, 1993

Method of cleaning a process tube

TOKYO ELECTRON LTD30 citations87

IWATANI & CO

1 patent

US5421902AJun 6, 1995

Non-plasma cleaning method for semiconductor manufacturing apparatus

IWATANI & CO15 citations66