Inventor

SASAJIMA FUMIHIRO

JP28 patents

⚠️ This page may combine multiple inventors who share the name “SASAJIMA FUMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SASAJIMA FUMIHIRO

HITACHI HIGH TECH CORP

Charged particle beam adjusting method and charged particle beam apparatus

Image processing apparatus for analysis of pattern matching failure

Charged particle beam apparatus

Scanning electron microscope and a method for pattern composite inspection using the same

Pattern measuring method

Charged particle beam apparatus

Scanning electron microscope

Charged particle beam apparatus

Pattern measuring method

Error factor estimation device and error factor estimation method

Charged particle radiation apparatus

Charged particle beam adjustment method and apparatus

Diagnostic system

Error cause estimation device and estimation method

HITACHI LTD

Microstructured pattern inspection method

Microstructured pattern inspection method

Microstructured pattern inspection method

Microstructured pattern inspection method

Microstructured pattern inspection method

Microstructured pattern inspection method

SASAJIMA FUMIHIRO

Microstructured pattern inspection method

Pattern measuring method, pattern measuring apparatus, and program using same

NAMAI HITOSHI

Edge detection technique and charged particle radiation equipment

Pattern determination device and computer program

SATO YOSHIMICHI

Pattern matching method and image processing device

Image processing system and scanning electron microscope

IKEDA MITSUJI

Image processing apparatus for analysis of pattern matching failure

SAKAI KEI

Pattern-searching condition determining method, and pattern-searching condition setting device