Inventor
MULDER HEINE MELLE
NL35 patents
⚠️ This page may combine multiple inventors who share the name “MULDER HEINE MELLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
22 patentsUS7038763B2May 2, 2006
Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV65 citations96
US6958806B2Oct 25, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations96
US6737662B2May 18, 2004
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product
ASML NETHERLANDS BV109 citations96
US7525642B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV32 citations92
US7030958B2Apr 18, 2006
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
ASML NETHERLANDS BV31 citations88
US6862076B2Mar 1, 2005
Method of determining stray radiation lithographic projection apparatus
ASML NETHERLANDS BV13 citations82
US10295916B2May 21, 2019
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US8052289B2Nov 8, 2011
Mirror array for lithography
ASML NETHERLANDS BV4 citations61
US7924406B2Apr 12, 2011
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
ASML NETHERLANDS BV3 citations60
US7508487B2Mar 24, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60
US9651875B2May 16, 2017
Illumination system and lithographic apparatus
ASML NETHERLANDS BV0 citations52
US7397535B2Jul 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations52
US10394143B2Aug 27, 2019
Topography measurement system
ASML NETHERLANDS BV0 citations51
US10222703B2Mar 5, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9778575B2Oct 3, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US7312850B2Dec 25, 2007
Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution
ASML NETHERLANDS BV1 citations51
US7671968B2Mar 2, 2010
Lithographic apparatus having masking parts and device manufacturing method
ASML NETHERLANDS BV1 citations50
US9823576B2Nov 21, 2017
Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method
ASML NETHERLANDS BV0 citations46
US9715183B2Jul 25, 2017
Device, lithographic apparatus, method for guiding radiation and device manufacturing method
ASML NETHERLANDS BV0 citations45
US7224440B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41
US7903234B2Mar 8, 2011
Lithographic apparatus, device manufacturing method and computer program product
ASML NETHERLANDS BV0 citations39
US7872731B2Jan 18, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations33
MULDER HEINE MELLE
6 patentsUS9116439B2Aug 25, 2015
Illumination system and lithographic apparatus
MULDER HEINE MELLE4 citations72
US8896815B2Nov 25, 2014
Lithographic apparatus and device manufacturing method
MULDER HEINE MELLE2 citations62
US8937706B2Jan 20, 2015
Lithographic apparatus and method
MULDER HEINE MELLE3 citations60
US8194231B2Jun 5, 2012
Lithographic apparatus and method
MULDER HEINE MELLE2 citations55
US8587766B2Nov 19, 2013
Lithographic apparatus and device manufacturing method
MULDER HEINE MELLE1 citations51
US9250536B2Feb 2, 2016
Lithographic apparatus and method
MULDER HEINE MELLE0 citations48