Inventor

HOEGEE JAN

NL3 patents

⚠️ This page may combine multiple inventors who share the name “HOEGEE JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US6958806B2Oct 25, 2005

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV67 citations96

US6583855B2Jun 24, 2003

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV41 citations89

ZEISS CARL SEMICONDUCTOR MFG

1 patent

US6733165B2May 11, 2004

Optical integrator for an illumination device

ZEISS CARL SEMICONDUCTOR MFG13 citations79