Inventor
BOAS RYAN C
US4 patents
Patents
4 patentsUS6215106B1Apr 10, 2001
Thermally processing a substrate
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US6803546B1Oct 12, 2004
Thermally processing a substrate
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US6897131B2May 24, 2005
Advances in spike anneal processes for ultra shallow junctions
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US6350964B1Feb 26, 2002
Power distribution printed circuit board for a semiconductor processing system
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