Inventor
GOULD RICHARD
US14 patents
⚠️ This page may combine multiple inventors who share the name “GOULD RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9502275B1Nov 22, 2016
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs
LAM RES CORP13 citations82
US10153282B1Dec 11, 2018
Ultra-high vacuum transport and storage
LAM RES CORP3 citations69
US10014196B2Jul 3, 2018
Wafer transport assembly with integrated buffers
LAM RES CORP0 citations50
US9929028B2Mar 27, 2018
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs
LAM RES CORP1 citations50
US10304707B2May 28, 2019
Load lock interface and integrated post-processing module
LAM RES CORP0 citations41