Inventor

NIKKEL ERIC LEE

US2 patents

Patents

2 patents

US6739199B1May 25, 2004

Substrate and method of forming substrate for MEMS device with strain gage

HEWLETT PACKARD DEVELOPMENT CO33 citations85

US6903487B2Jun 7, 2005

Micro-mirror device with increased mirror tilt

HEWLETT PACKARD DEVELOPMENT CO12 citations78