Inventor
CASEY JR J DAVID
US7 patents
⚠️ This page may combine multiple inventors who share the name “CASEY JR J DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
6 patentsUS6753538B2Jun 22, 2004
Electron beam processing
FEI CO179 citations95
US6641705B2Nov 4, 2003
Apparatus and method for reducing differential sputter rates
FEI CO44 citations90
US6322672B1Nov 27, 2001
Method and apparatus for milling copper interconnects in a charged particle beam system
FEI CO39 citations89
US6709554B2Mar 23, 2004
Method and apparatus for repairing lithography masks using a charged particle beam system
FEI CO37 citations85
US7662524B2Feb 16, 2010
Photolithography mask repair
FEI CO14 citations81
US7727681B2Jun 1, 2010
Electron beam processing for mask repair
FEI CO9 citations80