Inventor

DIEU LAURENT

US4 patents

⚠️ This page may combine multiple inventors who share the name “DIEU LAURENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DUPONT PHOTOMASKS INC

1 patent

US7101645B1Sep 5, 2006

Reflective mask for short wavelength lithography

DUPONT PHOTOMASKS INC12 citations80

HOYA CORP

1 patent

US6844119B2Jan 18, 2005

Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask

HOYA CORP9 citations72

DU PONT

1 patent

US6756161B2Jun 29, 2004

Ion-beam deposition process for manufacture of binary photomask blanks

DU PONT6 citations60

TOPPAN PHOTOMASKS INC

1 patent

US7056623B2Jun 6, 2006

Photomask and method for manufacturing the same

TOPPAN PHOTOMASKS INC0 citations48