Inventor
CORCORAN NOEL
US7 patents
Patents
7 patentsUS7138212B2Nov 21, 2006
Method and apparatus for performing model-based layout conversion for use with dipole illumination
ASML MASKTOOLS BV39 citations95
US7246342B2Jul 17, 2007
Orientation dependent shielding for use with dipole illumination techniques
ASML MASKTOOLS BV33 citations91
US6915505B2Jul 5, 2005
Method and apparatus for performing rule-based gate shrink utilizing dipole illumination
ASML MASKTOOLS BV34 citations91
US7666554B2Feb 23, 2010
Method and apparatus for performing model-based layout conversion for use with dipole illumination
ASML MASKTOOLS BV11 citations83
US7725872B2May 25, 2010
Orientation dependent shielding for use with dipole illumination techniques
ASML MASKTOOLS BV13 citations82
US7617476B2Nov 10, 2009
Method for performing pattern pitch-split decomposition utilizing anchoring features
ASML MASKTOOLS BV7 citations73
US7985515B2Jul 26, 2011
Method and apparatus for performing model-based layout conversion for use with dipole illumination
ASML MASKTOOLS BV0 citations51