Inventor
HASE TOMOHARU
JP11 patents
Patents
11 patentsUS6252648B1Jun 26, 2001
Exposure apparatus and method of cleaning optical element of the same
CANON KK91 citations97
US6630985B2Oct 7, 2003
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components
CANON KK14 citations91
US7236239B2Jun 26, 2007
Illumination system and exposure apparatus
CANON KK13 citations82
US6552774B2Apr 22, 2003
Exposure apparatus
CANON KK8 citations73
US6999159B2Feb 14, 2006
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components
CANON KK4 citations72
US6853439B1Feb 8, 2005
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components
CANON KK9 citations72
US7119878B2Oct 10, 2006
Exposure apparatus and method of cleaning optical element of the same
CANON KK3 citations62
US7061576B2Jun 13, 2006
Exposure apparatus and method of cleaning optical element of the same
CANON KK1 citations62
US7251014B2Jul 31, 2007
Exposing method, exposing apparatus and device manufacturing method utilizing them
CANON KK1 citations51
US7116397B2Oct 3, 2006
Exposure apparatus and device manufacturing method
CANON KK0 citations51
US6967706B2Nov 22, 2005
Exposure apparatus and device manufacturing method including gas purging of a space containing optical components
CANON KK0 citations51