Inventor
SAMSAVAR AMIN
US17 patents
⚠️ This page may combine multiple inventors who share the name “SAMSAVAR AMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS5948972ASep 7, 1999
Dual stage instrument for scanning a specimen
KLA TENCOR CORP129 citations98
US6267005B1Jul 31, 2001
Dual stage instrument for scanning a specimen
KLA TENCOR CORP119 citations97
US5955661ASep 21, 1999
Optical profilometer combined with stylus probe measurement device
KLA TENCOR CORP125 citations97
US5852232ADec 22, 1998
Acoustic sensor as proximity detector
KLA TENCOR CORP180 citations96
US5866806AFeb 2, 1999
System for locating a feature of a surface
KLA TENCOR CORP98 citations93
US7100430B2Sep 5, 2006
Dual stage instrument for scanning a specimen
KLA TENCOR CORP27 citations91
US6520005B2Feb 18, 2003
System for sensing a sample
KLA TENCOR CORP19 citations91
US7278301B2Oct 9, 2007
System for sensing a sample
KLA TENCOR CORP2 citations61
US6931917B2Aug 23, 2005
System for sensing a sample
KLA TENCOR CORP1 citations61
KLA TENCOR TECH CORP
7 patentsUS7012438B1Mar 14, 2006
Methods and systems for determining a property of an insulating film
KLA TENCOR TECH CORP63 citations98
US7248062B1Jul 24, 2007
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP30 citations92
US6794886B1Sep 21, 2004
Tank probe for measuring surface conductance
KLA TENCOR TECH CORP24 citations92
US6759255B2Jul 6, 2004
Method and system for detecting metal contamination on a semiconductor wafer
KLA TENCOR TECH CORP23 citations86
US7358748B1Apr 15, 2008
Methods and systems for determining a property of an insulating film
KLA TENCOR TECH CORP14 citations84
US7719294B1May 18, 2010
Systems configured to perform a non-contact method for determining a property of a specimen
KLA TENCOR TECH CORP10 citations83
US7538333B1May 26, 2009
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP3 citations62