Inventor
OLIVER I ROGER
US11 patents
Patents
11 patentsUS6566667B1May 20, 2003
Plasma focus light source with improved pulse power system
CYMER INC185 citations99
US6477193B2Nov 5, 2002
Extreme repetition rate gas discharge laser with improved blower motor
CYMER INC155 citations98
US6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6815700B2Nov 9, 2004
Plasma focus light source with improved pulse power system
CYMER INC113 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US6442181B1Aug 27, 2002
Extreme repetition rate gas discharge laser
CYMER INC56 citations95
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US6026103AFeb 15, 2000
Gas discharge laser with roller bearings and stable magnetic axial positioning
CYMER INC34 citations92
US7323703B2Jan 29, 2008
EUV light source
CYMER INC10 citations84
US7291853B2Nov 6, 2007
Discharge produced plasma EUV light source
CYMER INC9 citations73
US6425559B1Jul 30, 2002
Gas laser chamber with vertical vibration isolator
CYMER INC9 citations73