Inventor
BOWERING NORBERT R
US18 patents
⚠️ This page may combine multiple inventors who share the name “BOWERING NORBERT R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
12 patentsUS7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7843632B2Nov 30, 2010
EUV optics
CYMER INC31 citations92
US7589337B2Sep 15, 2009
LPP EUV plasma source material target delivery system
CYMER INC23 citations92
US7465946B2Dec 16, 2008
Alternative fuels for EUV light source
CYMER INC40 citations92
US7394083B2Jul 1, 2008
Systems and methods for EUV light source metrology
CYMER INC24 citations92
US7109503B1Sep 19, 2006
Systems for protecting internal components of an EUV light source from plasma-generated debris
CYMER INC25 citations92
US7453077B2Nov 18, 2008
EUV light source
CYMER INC20 citations91
US7193228B2Mar 20, 2007
EUV light source optical elements
CYMER INC38 citations91
US7960701B2Jun 14, 2011
EUV light source components and methods for producing, using and refurbishing same
CYMER INC8 citations83
US10185234B2Jan 22, 2019
Harsh environment optical element protection
CYMER INC1 citations62
US8686370B2Apr 1, 2014
EUV light source components and methods for producing, using and refurbishing same
CYMER INC3 citations61