Inventor
SIMMONS RODNEY D
US8 patents
⚠️ This page may combine multiple inventors who share the name “SIMMONS RODNEY D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
6 patentsUS7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7453077B2Nov 18, 2008
EUV light source
CYMER INC20 citations91
US7291853B2Nov 6, 2007
Discharge produced plasma EUV light source
CYMER INC9 citations73
US7402825B2Jul 22, 2008
LPP EUV drive laser input system
CYMER INC6 citations60