Inventor
ROSS BRENDA FAYE
US4 patents
Patents
4 patentsUS7208049B2Apr 24, 2007
Process solutions containing surfactants used as post-chemical mechanical planarization treatment
AIR PROD & CHEM14 citations82
US7348300B2Mar 25, 2008
Acetylenic diol ethylene oxide/propylene oxide adducts and processes for their manufacture
AIR PROD & CHEM12 citations80
US9472420B2Oct 18, 2016
Composition for titanium nitride hard mask and etch residue removal
AIR PROD & CHEM2 citations62
US7452426B2Nov 18, 2008
Process solutions containing surfactants used as post-chemical mechanical planarization treatment
AIR PROD & CHEM4 citations60