Inventor
MICHELSSON DETLEF
DE11 patents
⚠️ This page may combine multiple inventors who share the name “MICHELSSON DETLEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VISTEC SEMICONDUCTOR SYS GMBH
5 patentsUS7657077B2Feb 2, 2010
Detecting defects by three-way die-to-die comparison with false majority determination
VISTEC SEMICONDUCTOR SYS GMBH8 citations76
US7292328B2Nov 6, 2007
Method for inspection of a wafer
VISTEC SEMICONDUCTOR SYS GMBH8 citations72
US7193699B2Mar 20, 2007
Method and apparatus for scanning a semiconductor wafer
VISTEC SEMICONDUCTOR SYS GMBH9 citations72
US7477370B2Jan 13, 2009
Method of detecting incomplete edge bead removal from a disk-like object
VISTEC SEMICONDUCTOR SYS GMBH6 citations59
US7973931B2Jul 5, 2011
Method for determining the position of the edge bead removal line of a disk-like object
VISTEC SEMICONDUCTOR SYS GMBH3 citations53
MICHELSSON DETLEF
4 patentsUS8200004B2Jun 12, 2012
Method for inspecting a surface of a wafer with regions of different detection sensitivity
MICHELSSON DETLEF9 citations82
US8705837B2Apr 22, 2014
Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method
MICHELSSON DETLEF4 citations65
US8264534B2Sep 11, 2012
Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera
MICHELSSON DETLEF3 citations60
US8200003B2Jun 12, 2012
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
MICHELSSON DETLEF5 citations60