Inventor
KUTNEY MICHAEL C
US11 patents
⚠️ This page may combine multiple inventors who share the name “KUTNEY MICHAEL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7987814B2Aug 2, 2011
Lower liner with integrated flow equalizer and improved conductance
APPLIED MATERIALS INC26 citations92
US9685655B2Jun 20, 2017
Complex showerhead coating apparatus with electrospray for lithium ion battery
APPLIED MATERIALS INC2 citations69
US8048806B2Nov 1, 2011
Methods to avoid unstable plasma states during a process transition
APPLIED MATERIALS INC5 citations62
US11054184B2Jul 6, 2021
Methods and apparatus for processing a substrate to remove moisture and/or residue
APPLIED MATERIALS INC0 citations61
US10247473B2Apr 2, 2019
Methods and apparatus for processing a substrate to remove moisture and/or residue
APPLIED MATERIALS INC0 citations51
US9982786B2May 29, 2018
Valve with adjustable hard stop
APPLIED MATERIALS INC0 citations51
CARDUCCI JAMES D
4 patentsUS8282736B2Oct 9, 2012
Lower liner with integrated flow equalizer and improved conductance
CARDUCCI JAMES D14 citations92
US8118938B2Feb 21, 2012
Lower liner with integrated flow equalizer and improved conductance
CARDUCCI JAMES D26 citations92
US8440019B2May 14, 2013
Lower liner with integrated flow equalizer and improved conductance
CARDUCCI JAMES D7 citations83
US8313578B2Nov 20, 2012
Etching chamber having flow equalizer and lower liner
CARDUCCI JAMES D13 citations83