Inventor
GENJIMA HISASHI
JP8 patents
Patents
8 patentsUS9418860B2Aug 16, 2016
Use of topography to direct assembly of block copolymers in grapho-epitaxial applications
TOKYO ELECTRON LTD12 citations91
US11315784B2Apr 26, 2022
Method for forming insulating film, apparatus for processing substrate, and system for processing substrate
TOKYO ELECTRON LTD2 citations71
US10418242B2Sep 17, 2019
Substrate treatment method using a block copolymer containing a hydrophilic and a hydrophobic polymers
TOKYO ELECTRON LTD2 citations71
US11823897B2Nov 21, 2023
Method for forming insulating film, apparatus for processing substrate, and system for processing substrate
TOKYO ELECTRON LTD0 citations61
US11574812B2Feb 7, 2023
Computer storage medium to perform a substrate treatment method using a block copolymer containing a hydrophilic and hydrophobic copolymers
TOKYO ELECTRON LTD0 citations61
US11631581B2Apr 18, 2023
Insulating film forming method, insulating film forming device, and substrate processing system
TOKYO ELECTRON LTD0 citations51
US10586711B2Mar 10, 2020
Substrate processing method and computer storage medium
TOKYO ELECTRON LTD0 citations40
US10329144B2Jun 25, 2019
Substrate treatment method, computer storage medium and substrate treatment system
TOKYO ELECTRON LTD0 citations40