Inventor
JO JEONG HEE
KR6 patents
Patents
6 patentsUS11183372B2Nov 23, 2021
Batch type plasma substrate processing apparatus
EUGENE TECHNOLOGY CO LTD3 citations70
US10961626B2Mar 30, 2021
Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates
EUGENE TECHNOLOGY CO LTD1 citations59
US11031214B2Jun 8, 2021
Batch type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations56
US12354850B2Jul 8, 2025
Apparatus and method for processing substrate
EUGENE TECHNOLOGY CO LTD0 citations48
US12555755B2Feb 17, 2026
Batch type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations47
US11495442B2Nov 8, 2022
Batch type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations46