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Inventor
Wang tianhan
US
2 patents
⚠️ This page may combine multiple inventors who share the name “Wang tianhan”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
1 patent
US11378451B2
Jul 5, 2022
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA TENCOR CORP
3 citations
70
KLA CORP
1 patent
US11796390B2
Oct 24, 2023
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA CORP
0 citations
59