Inventor
ROSENBERG AARON
US7 patents
⚠️ This page may combine multiple inventors who share the name “ROSENBERG AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patentsUS11573077B2Feb 7, 2023
Scatterometry based methods and systems for measurement of strain in semiconductor structures
KLA CORP4 citations73
US11060846B2Jul 13, 2021
Scatterometry based methods and systems for measurement of strain in semiconductor structures
KLA CORP0 citations61
US11796390B2Oct 24, 2023
Bandgap measurements of patterned film stacks using spectroscopic metrology
KLA CORP0 citations59