Inventor

PANDEV STILIAN

US17 patents

⚠️ This page may combine multiple inventors who share the name “PANDEV STILIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PANDEV STILIAN

KLA CORP

Signal-domain adaptation for metrology

Self-calibrating overlay metrology

Estimating in-die overlay with tool induced shift correction

Self-calibrating overlay metrology

Bandgap measurements of patterned film stacks using spectroscopic metrology

Self-calibrated overlay metrology using a skew training sample

System and method for estimating measurement uncertainty for characterization systems

Imaging reflectometry for inline screening

Single wafer orientation tool-induced shift cleaning

Correcting target locations for temperature in semiconductor applications

KLA TENCOR CORP

Measurement of overlay error using device inspection system

Process-sensitive metrology systems and methods

Bandgap measurements of patterned film stacks using spectroscopic metrology

Focus measurements using scatterometry metrology

Measurement of overlay error using device inspection system

Automated image-based process monitoring and control

Semiconductor metrology and defect classification using electron microscopy