Inventor
SONG JONG KOOK
KR4 patents
Patents
4 patentsUS6159823ADec 12, 2000
Trench isolation method of semiconductor device
SAMSUNG ELECTRONICS CO LTD56 citations91
US6153014ANov 28, 2000
Method of cleaning a silicon wafer using a standard cleaning solution
SAMSUNG ELECTRONICS CO LTD20 citations89
US7398676B2Jul 15, 2008
Leak sensor and leak sensing system
SAMSUNG ELECTRONICS CO LTD11 citations76
US7186299B2Mar 6, 2007
Method of rinsing and drying semiconductor substrates
SAMSUNG ELECTRONICS CO LTD5 citations54