Inventor
NISHIDE HAJIME
JP5 patents
Patents
5 patentsUS11915945B2Feb 27, 2024
Substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations66
US12337289B2Jun 24, 2025
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US12064739B2Aug 20, 2024
Chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US11439967B2Sep 13, 2022
Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device
SCREEN HOLDINGS CO LTD0 citations59
US12456634B2Oct 28, 2025
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations56