Inventor

KASUMI KAZUYUKI

JP41 patents

⚠️ This page may combine multiple inventors who share the name “KASUMI KAZUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KASUMI KAZUYUKI

CANON KK

Vacuum chuck

Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same

Mirror unit and an exposure apparatus using the unit

X-ray exposure apparatus

Imprinting machine and device manufacturing method

Pattern forming apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus and exposing method

Mask holding device, exposure apparatus and device manufacturing method

Exposure apparatus

Imprint apparatus in which alignment control of a mold and a substrate is effected

Processing apparatus

Processing method

Processing apparatus and method

Processing apparatus

Exposure method, exposure apparatus and semiconductor manufacturing apparatus

Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method

Load-lock technique

Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method

Exposure apparatus, device manufacturing method, stage apparatus, and alignment method

Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method

Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contact

Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate

Processing apparatus and method

Processing apparatus and device manufacturing method

Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same

Load-lock technique

Exposure apparatus and device manufacturing method

Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration

Fine pattern forming apparatus and fine pattern inspecting apparatus

Light source device, cooling method, and manufacturing method for product

Exposure apparatus, device manufacturing method, stage apparatus, and alignment method

Load-lock technique

KASUMI KAZUYUKI

Imprint apparatus, imprint method, and article manufacturing method

Pattern transferring apparatus and pattern transferring method

Imprinting apparatus and article manufacturing method

Processing apparatus

Holding apparatus, optical apparatus, and telescope

NAKAMURA TAKASHI

Imprinting machine and device manufacturing method

OKUSHIMA SHINGO

Imprinting method and process for producing a member in which a mold contacts a pattern forming layer

KAWAKAMI EIGO

Imprint apparatus and article manufacturing method