Inventor
KAMENETSKIY EVGENY
US12 patents
Patents
12 patentsUS10923321B2Feb 16, 2021
Apparatus and method of generating a pulsed waveform
APPLIED MATERIALS INC52 citations97
US10916408B2Feb 9, 2021
Apparatus and method of forming plasma using a pulsed waveform
APPLIED MATERIALS INC54 citations97
US11462389B2Oct 4, 2022
Pulsed-voltage hardware assembly for use in a plasma processing system
APPLIED MATERIALS INC12 citations93
US11848176B2Dec 19, 2023
Plasma processing using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC5 citations86
US11776789B2Oct 3, 2023
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US11699572B2Jul 11, 2023
Feedback loop for controlling a pulsed voltage waveform
APPLIED MATERIALS INC8 citations85
US11462388B2Oct 4, 2022
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC6 citations85
US12237148B2Feb 25, 2025
Plasma processing assembly using pulsed-voltage and radio-frequency power
APPLIED MATERIALS INC2 citations74
US12057292B2Aug 6, 2024
Feedback loop for controlling a pulsed voltage waveform
APPLIED MATERIALS INC0 citations62
US11482402B2Oct 25, 2022
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations62
US11668553B2Jun 6, 2023
Apparatus and method for controlling edge ring variation
APPLIED MATERIALS INC0 citations61
US12435963B2Oct 7, 2025
Apparatus and method for controlling edge ring variation
APPLIED MATERIALS INC0 citations60