Inventor
KIRISEKO TADASHI
JP9 patents
Patents
9 patentsUS4896034AJan 23, 1990
Method of identifying a semiconductor wafer utilizing a light source and a detector
FUJITSU LTD75 citations95
US5024570AJun 18, 1991
Continuous semiconductor substrate processing system
FUJITSU LTD117 citations91
US4825093AApr 25, 1989
Methods for identifying semiconductor wafer with bar code pattern thereon and methods for manufacturing semiconductor device
FUJITSU LTD45 citations91
US4408387AOct 11, 1983
Method for producing a bipolar transistor utilizing an oxidized semiconductor masking layer in conjunction with an anti-oxidation mask
FUJITSU LTD20 citations81
US4449037AMay 15, 1984
Method and apparatus for heating semiconductor wafers
FUJITSU LTD20 citations77
US4613887ASep 23, 1986
Semiconductor device with a means for discharging carriers
FUJITSU LTD10 citations73
US4525922AJul 2, 1985
Method of producing a semiconductor device
FUJITSU LTD12 citations72
US4473940AOct 2, 1984
Method of producing a semiconductor device
FUJITSU LTD11 citations72
US4328263AMay 4, 1982
Method of manufacturing semiconductor devices using lift-off technique
FUJITSU LTD10 citations71