Inventor
VOWLES E JOHN
US11 patents
⚠️ This page may combine multiple inventors who share the name “VOWLES E JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEN SIGNAL CORP
7 patentsUS5076205ADec 31, 1991
Modular vapor processor system
GEN SIGNAL CORP280 citations98
US4715921ADec 29, 1987
Quad processor
GEN SIGNAL CORP140 citations97
US5344542ASep 6, 1994
Multiple-processing and contamination-free plasma etching system
GEN SIGNAL CORP64 citations95
US5308431AMay 3, 1994
System providing multiple processing of substrates
GEN SIGNAL CORP48 citations92
US5102495AApr 7, 1992
Method providing multiple-processing of substrates
GEN SIGNAL CORP25 citations92
US5013385AMay 7, 1991
Quad processor
GEN SIGNAL CORP43 citations92
US5013400AMay 7, 1991
Dry etch process for forming champagne profiles, and dry etch apparatus
GEN SIGNAL CORP90 citations91
APPLIED MATERIALS INC
4 patentsUS6103055AAug 15, 2000
System for processing substrates
APPLIED MATERIALS INC39 citations92
US6214119B1Apr 10, 2001
Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber
APPLIED MATERIALS INC14 citations81
US6413320B2Jul 2, 2002
Integrated processing system having multiple reactors connected to a central chamber
APPLIED MATERIALS INC5 citations73
US6776846B2Aug 17, 2004
Integrated processing system having multiple reactors connected to a central chamber
APPLIED MATERIALS INC3 citations62