Inventor
MAHER JOSEPH A
US11 patents
⚠️ This page may combine multiple inventors who share the name “MAHER JOSEPH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEN SIGNAL CORP
7 patentsUS5076205ADec 31, 1991
Modular vapor processor system
GEN SIGNAL CORP280 citations98
US4715921ADec 29, 1987
Quad processor
GEN SIGNAL CORP140 citations97
US5344542ASep 6, 1994
Multiple-processing and contamination-free plasma etching system
GEN SIGNAL CORP64 citations95
US5248371ASep 28, 1993
Hollow-anode glow discharge apparatus
GEN SIGNAL CORP255 citations95
US5308431AMay 3, 1994
System providing multiple processing of substrates
GEN SIGNAL CORP48 citations92
US5102495AApr 7, 1992
Method providing multiple-processing of substrates
GEN SIGNAL CORP25 citations92
US5013385AMay 7, 1991
Quad processor
GEN SIGNAL CORP43 citations92
APPLIED MATERIALS INC
4 patentsUS6103055AAug 15, 2000
System for processing substrates
APPLIED MATERIALS INC39 citations92
US6214119B1Apr 10, 2001
Vacuum substrate processing system having multiple processing chambers and a central load/unload chamber
APPLIED MATERIALS INC14 citations81
US6413320B2Jul 2, 2002
Integrated processing system having multiple reactors connected to a central chamber
APPLIED MATERIALS INC5 citations73
US6776846B2Aug 17, 2004
Integrated processing system having multiple reactors connected to a central chamber
APPLIED MATERIALS INC3 citations62