Inventor

LAXMAN RAVI KUMAR

US7 patents

⚠️ This page may combine multiple inventors who share the name “LAXMAN RAVI KUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR PROD & CHEM

5 patents

US5976991ANov 2, 1999

Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane

AIR PROD & CHEM101 citations97

US5744196AApr 28, 1998

NOVELLUS SYSTEMS INC

2 patents

US6340628B1Jan 22, 2002

Method to deposit SiOCH films with dielectric constant below 3.0

NOVELLUS SYSTEMS INC166 citations98

US6576345B1Jun 10, 2003

Dielectric films with low dielectric constants

NOVELLUS SYSTEMS INC110 citations97

LAXMAN RAVI KUMAR

AIR PROD & CHEM

Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane

Low temperature deposition of silicon dioxide using organosilanes

Silicon nitride from bis(tertiarybutylamino)silane

Process for the production and purification of bis(tertiary-butylamino)silane

Purification of organosilanes of group 13 (IIIA) and 15 (VA) impurities

NOVELLUS SYSTEMS INC

Method to deposit SiOCH films with dielectric constant below 3.0

Dielectric films with low dielectric constants