Inventor
JU BYONG-SUN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “JU BYONG-SUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS6169009B1Jan 2, 2001
Methods of etching platinum group metal film and forming lower electrode of capacitor
SAMSUNG ELECTRONICS CO LTD25 citations91
US6004882ADec 21, 1999
Method for etching Pt film of semiconductor device
SAMSUNG ELECTRONICS CO LTD19 citations90
US6054391AApr 25, 2000
Method for etching a platinum layer in a semiconductor device
SAMSUNG ELECTRONICS CO LTD18 citations82
US6653225B2Nov 25, 2003
Method for forming gate electrode structure with improved profile and gate electrode structure therefor
SAMSUNG ELECTRONICS CO LTD2 citations58