Inventor
UMEMOTO SEIJIRO
JP7 patents
Patents
7 patentsUS7354873B2Apr 8, 2008
Method for forming insulation film
ASM JAPAN479 citations98
US7504344B2Mar 17, 2009
Method of forming a carbon polymer film using plasma CVD
ASM JAPAN419 citations97
US6881683B2Apr 19, 2005
Insulation film on semiconductor substrate and method for forming same
ASM JAPAN51 citations92
US6830007B2Dec 14, 2004
Apparatus and method for forming low dielectric constant film
ASM JAPAN26 citations92
US6784123B2Aug 31, 2004
Insulation film on semiconductor substrate and method for forming same
ASM JAPAN28 citations92
US6537928B1Mar 25, 2003
Apparatus and method for forming low dielectric constant film
ASM JAPAN33 citations92
US7470633B2Dec 30, 2008
Method of forming a carbon polymer film using plasma CVD
ASM JAPAN3 citations61