Inventor
YABE YOICHIRO
JP3 patents
Patents
3 patentsUS6855236B2Feb 15, 2005
Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus
TOSHIBA KK46 citations91
US6225741B1May 1, 2001
Package film for EL panel, its manufacture, and EL panel and LCD module employing the film
TOSHIBA KK13 citations71
US7718117B2May 18, 2010
Tungsten sputtering target and method of manufacturing the target
TOSHIBA KK4 citations61