Inventor
LIN YEH-SEN
TW9 patents
Patents
9 patentsUS5780339AJul 14, 1998
Method for fabricating a semiconductor memory cell in a DRAM
VANGUARD INT SEMICONDUCT CORP60 citations95
US6004853ADec 21, 1999
Method to improve uniformity and the critical dimensions of a DRAM gate structure
VANGUARD INT SEMICONDUCT CORP37 citations91
US5770510AJun 23, 1998
Method for manufacturing a capacitor using non-conformal dielectric
VANGUARD INT SEMICONDUCT CORP20 citations83
US6329252B1Dec 11, 2001
Method of forming self-aligned contacts
VANGUARD INT SEMICONDUCT CORP18 citations82
US5597764AJan 28, 1997
Method of contact formation and planarization for semiconductor processes
VANGUARD INT SEMICONDUCT CORP11 citations73
US6309968B1Oct 30, 2001
Method to improve intrinsic refresh time and dichlorosilane formed gate oxide reliability
VANGUARD INT SEMICONDUCT CORP8 citations72
US6251742B1Jun 26, 2001
Method of manufacturing a cup-shape capacitor
VANGUARD INT SEMICONDUCT CORP14 citations72
US5668039ASep 16, 1997
Method for forming crown-shape capacitor node with tapered etching
VANGUARD INT SEMICONDUCT CORP14 citations72
US6207491B1Mar 27, 2001
Method for preventing silicon substrate loss in fabricating semiconductor device
VANGUARD INT SEMICONDUCT CORP5 citations60