Inventor
NAGANO SHOZO
JP2 patents
Patents
2 patentsUS6797079B2Sep 28, 2004
Physical vapor deposition target
HONEYWELL INT INC17 citations87
US6758920B2Jul 6, 2004
Conductive integrated circuit metal alloy interconnections, electroplating anodes; metal alloys for use as a conductive interconnection in an integrated circuit; and physical vapor deposition targets
HONEYWELL INT INC8 citations68