Inventor
BUEHLER JANE
US4 patents
Patents
4 patentsUS6503380B1Jan 7, 2003
Physical vapor target constructions
HONEYWELL INT INC32 citations88
US6797079B2Sep 28, 2004
Physical vapor deposition target
HONEYWELL INT INC17 citations87
US6758920B2Jul 6, 2004
Conductive integrated circuit metal alloy interconnections, electroplating anodes; metal alloys for use as a conductive interconnection in an integrated circuit; and physical vapor deposition targets
HONEYWELL INT INC8 citations68
US6971151B2Dec 6, 2005
Methods of treating physical vapor deposition targets
HONEYWELL INT INC2 citations58