Inventor
BLIVEN BRIAN M
US9 patents
⚠️ This page may combine multiple inventors who share the name “BLIVEN BRIAN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6415804B1Jul 9, 2002
Bowl for processing semiconductor wafers
LAM RES CORP23 citations91
US6557202B1May 6, 2003
Wafer scrubbing brush core having an internal motor and method of making the same
LAM RES CORP17 citations79
US6607072B2Aug 19, 2003
Wheel and conveyor system for transporting semiconductor wafers
LAM RES CORP5 citations73
US6439245B1Aug 27, 2002
Method for transferring wafers from a conveyor system to a wafer processing station
LAM RES CORP9 citations73
US6612315B2Sep 2, 2003
Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module
LAM RES CORP9 citations72
US6752162B1Jun 22, 2004
Edge roller assembly, method for contacting an edge of a substrate, and transport system for transporting semiconductor wafers to a wafer processing station
LAM RES CORP5 citations70
US6505417B2Jan 14, 2003
Method for controlling airflow on a backside of a semiconductor wafer during spin processing
LAM RES CORP2 citations61