Inventor

HA SUNGWON

US18 patents

⚠️ This page may combine multiple inventors who share the name “HA SUNGWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HA SUNGWON

APPLIED MATERIALS INC

Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system

Chamber configurations and processes for particle control

Plasma processing using multiple radio frequency power feeds for improved uniformity

Targeted heat control systems

Edge hump reduction faceplate by plasma modulation

Chamber configurations and processes for particle control

Pedestal for substrate processing chambers

Process chamber with reduced plasma arc

Pedestal for substrate processing chambers

Plasma processing using multiple radio frequency power feeds for improved uniformity

Processing chamber deposition confinement

Radiation shield modification for improving substrate temperature uniformity

Treatment for high-temperature cleans

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Systems and methods for faceplate temperature control

BYTEMOBILE INC

Quality of service management for multiple connections within a network communication system

Data transport acceleration and management within a network communication system

UNIV ILLINOIS

Thread based scalable routing for an active router