Inventor
BRENNAN DAMIAN
US5 patents
Patents
5 patentsUS6690022B2Feb 10, 2004
Ion beam incidence angle and beam divergence monitor
VARIAN SEMICONDUCTOR EQUIPMENT29 citations89
US7253423B2Aug 7, 2007
Technique for uniformity tuning in an ion implanter system
VARIAN SEMICONDUCTOR EQUIPMENT14 citations83
US7355188B2Apr 8, 2008
Technique for uniformity tuning in an ion implanter system
VARIAN SEMICONDUCTOR EQUIPMENT13 citations80
US7397047B2Jul 8, 2008
Technique for tuning an ion implanter system
VARIAN SEMICONDUCTOR EQUIPMENT6 citations61
US7462844B2Dec 9, 2008
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT6 citations57