P

Inventor

TAMAI TADAMOTO

JP10 patents
⚠️ This page may combine multiple inventors who share the name “TAMAI TADAMOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO EATON NOVA

5 patents
US5046992ASep 10, 1991

Robot arm capable of three-dimensionally moving a robot arm member

SUMITOMO EATON NOVA44 citations92
US4914292AApr 3, 1990

Ion implanting apparatus

SUMITOMO EATON NOVA35 citations92
US4904902AFeb 27, 1990

Ion implanting system

SUMITOMO EATON NOVA44 citations92
US4994674AFeb 19, 1991

Ion implantation apparatus capable of avoiding electrification of a substrate

SUMITOMO EATON NOVA10 citations73
US5030835AJul 9, 1991

Ion implantation capable of uniformly injecting an ion beam into a substrate

SUMITOMO EATON NOVA6 citations62

SUMITOMO HEAVY INDUSTRIES

2 patents
US5702228ADec 30, 1997

Robotic arm supporting an object by interactive mechanism

SUMITOMO HEAVY INDUSTRIES92 citations94
US5512106AApr 30, 1996

Surface cleaning with argon

SUMITOMO HEAVY INDUSTRIES66 citations90

EBARA CORP

2 patents
US6313469B1Nov 6, 2001

Substrate handling apparatus and ion implantation apparatus

EBARA CORP22 citations92
US5929456AJul 27, 1999

Ion implantation system and method adapted for serial wafer processing

EBARA CORP19 citations92

TAMAI TADAMOTO

1 patent
US7399154B2Jul 15, 2008

Vacuum processing system being able to carry process object into and out of vacuum chamber

TAMAI TADAMOTO4 citations56