Inventor
OKAJIMA YASUTOMO
JP3 patents
Patents
3 patentsUS7770500B2Aug 10, 2010
Substrate dividing system, substrate manufacturing equipment, substrate scribing method and substrate dividing method
MITSUBOSHI DIAMOND IND CO LTD9 citations79
US7426883B2Sep 23, 2008
Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method
MITSUBOSHI DIAMOND IND CO LTD17 citations79
US7845529B2Dec 7, 2010
Method for processing substrate, apparatus for processing substrate, method for conveying substrate and mechanism for conveying substrate
MITSUBOSHI DIAMOND IND CO LTD9 citations73